원자 힘 현미경을 이용한 Macrocyclic Diacetylene Nanotube 측정과 Octadecyltrichlorosilane Monolayer로 개질된 실리콘 기판에서의 나노 스케일 패터닝에 관한 연구

Abstract

The atomic force microscope is the one of the useful methods to fabricate the nanoscale patterns in the atmosphere and to measure various materials with the nanoscale resolution. In this thesis, the atomic force microscope is used for the high resolution siliconoxide patterns and the measurement of the structure of the macrocyclic diacetylene (MCDA)-3 nanotube and the MCDA-3 bundle. The MCDA-3 nanotube is the covalently linked chromogenic organic nanotube which is prepared by using the topochemical polymerization of self-assembled macrocyclic diacetylenes. The nanotube is clustered to form the bundle structure. The measured MCDA-3 nanotube’s width is 3.71 nm and the MCDA-3 nanotube bundle’s diameter is 19.8 nm. The Octadecyltrichlorosilane (OTS)-silicon which is created by the self assembly is used for the oxidation atomic force microscope lithography. The width and the uniformity of the patterns are affected by the hydrophobicity of the surface functional group. The methyl functional group of the OTS is hydrophobic, so the width and the uniformity of the patterns are reduced and improved. Because this hydrophobicity makes the water meniscus’s shape more spherical and uniform. In conclusion, the hydrophobicity of the OTS self assembled monolayer improves the integration and uniformity of the lithographic patterns of the oxidation AFM lithography.