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One-step micropatterning of highly-ordered semi-crystalline poly(vinylidene fluoride-co-trifluoroethylene) films by a selective shear and detachment process

Title
One-step micropatterning of highly-ordered semi-crystalline poly(vinylidene fluoride-co-trifluoroethylene) films by a selective shear and detachment process
Author
성명모
Keywords
Ferroelectric polymer; Static shear; Detachment; Micropattern; Crystal orientation; Non-volatile memory
Issue Date
2011-01
Publisher
ELSEVIER SCIENCE BV, PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS
Citation
In Organic Electronics 2011 12(1):98-107
Abstract
We present a one-step route for micropatterning a thin ferroelectric poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) film with both molecular and microstructural crystal control over a large area. The method is based on the static mechanical shearing and ;subsequent detachment of a film spin coated on pre-patterned Al which has been lithographically prepared on a SiO(2) substrate under appropriate thermal conditions. Selective detachment of the film in contact with the SiO(2) substrate gave rise to micropatterns of PVDF-TrFE film positioned only on the Al regions. Further, the PVDF-TrFE film showed 25-nm-thick crystalline lamellae aligned perpendicular to the shear direction, wherein the c axis of the crystals was globally ordered parallel to the shear direction. The sheared and patterned PVDF-TrFE thin films are readily incorporated into non-volatile memory units of metal/ferroelectric/metal capacitors and bottom gate-top contact field effect transistors, leading to arrays of memory devices with enhanced performance. (C) 2010 Elsevier B. V. All rights reserved.
URI
https://www.sciencedirect.com/science/article/pii/S1566119910003319?via%3Dihubhttp://hdl.handle.net/20.500.11754/67099
ISSN
1566-1199
DOI
10.1016/j.orgel.2010.10.007
Appears in Collections:
COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > CHEMISTRY(화학과) > Articles
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