Fabrication of a 3D Photonic Crystal Structure by Using the Wedge-shaped Cell Method

Abstract

As increase of applications for photonic crystal, there have been many efforts to fabricate large areas of uniform photonic crystal structures. But it is not easy to fabricate uniform and large areal photonic crystal structure because of some limitations in optimizing both the uniformity and the large area. In this paper, we examined wedged-shape cell method which is advantageous method to form uniform photonic crystal structure because it generates meniscus in line. Optimum conditions for the fabrication process were experimentally determined by measuring and analyzing the structural and optical properties of fabricated photonic crystal structure. And we confirmed that the photonic crystal structure fabricated by wedged-shape cell method has better photonic band gap property than the photonic crystal structure fabricated by the vertical deposition method by comparing transmission spectra.