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RESEARCH INSTITUTE[S](부설연구소)
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Results 1-2 of 2 (Search time: 0.002 seconds).
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2013-10
Effect of antenna size on electron kinetics in inductively coupled plasmas
이효창
2013-06
Discharge mode transition and hysteresis in inductively coupled plasma
이효창
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Coils
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Inductively coupled plasma
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DENSITY
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DISTRIBUTIONS
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Electron energy distribution func...
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ENERGY DISTRIBUTION FUNCTION
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2013
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