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dc.contributor.author박진구-
dc.date.accessioned2018-03-30T04:22:32Z-
dc.date.available2018-03-30T04:22:32Z-
dc.date.issued2014-05-
dc.identifier.citationECS Transactions, 2014, 61(17), P.27-35en_US
dc.identifier.issn1938-6737-
dc.identifier.issn1938-5862-
dc.identifier.urihttp://ecst.ecsdl.org/content/61/17/27-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/54233-
dc.description.abstractThe nitride removal rate by ceria abrasives in presence of amino acids is altered by the purity of ceria. Commercial ceria obtained from Sigma-Aldrich with low purity (<90%) and with high purity (99.95%) were employed in the study. Polishing experiments showed that in presence of lanthanum in the abrasive, proline does not suppress nitride removal. In order to verify that the effect is mainly due to presence of lanthanum, ceria particles were synthesized with and without lanthanum doping. Three types of amino acids viz. proline, alanine and glutamic acid were used with the ceria particles. The removal rate results show that proline is sensitive to presence of lanthanum impurity in abrasive, while alanine and glutamic acid suppress the nitride removal irrespective of the purity of the abrasives. The abrasives were characterized using XRD. The adsorption of amino acids on abrasive was characterized by differential thermal analysisen_US
dc.description.sponsorshipThe authors thank the Department of Science and Technology (DST), India (INT/Korea/P-01) and National Research Foundation (NRF), Korea (2011-0027711) for financing this joint venture project between India and Korea.en_US
dc.language.isoenen_US
dc.publisherElectrochemical Society Inc.en_US
dc.subjectAbrasivesen_US
dc.subjectAmino acidsen_US
dc.subjectChemical polishingen_US
dc.subjectDifferential thermal analysisen_US
dc.subjectLanthanumen_US
dc.subjectNitridesen_US
dc.subjectPolishingen_US
dc.subjectRemovalen_US
dc.subjectThermoanalysisen_US
dc.subjectCeria particlesen_US
dc.subjectGlutamic aciden_US
dc.subjectHigh purityen_US
dc.subjectLa dopingen_US
dc.subjectLanthanum dopingen_US
dc.subjectLow purityen_US
dc.subjectRemoval rateen_US
dc.subjectSigma-aldrichen_US
dc.subjectChemical mechanical polishingen_US
dc.titleEffect of La doping of ceria abrasives for STI CMPen_US
dc.typeArticleen_US
dc.relation.no17-
dc.relation.volume61-
dc.identifier.doi10.1149/06117.0027ecst-
dc.relation.page27-35-
dc.contributor.googleauthorPraveen, B. V. S.-
dc.contributor.googleauthorPark, Jin-Goo-
dc.contributor.googleauthorRamanathan, S.-
dc.sector.campusS-
dc.sector.daehakGRADUATE SCHOOL[S]-
dc.sector.departmentDEPARTMENT OF BIONANOTECHNOLOGY-
dc.identifier.pidjgpark-
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GRADUATE SCHOOL[S](대학원) > ETC
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