Browsing "RESEARCH INSTITUTE[S](부설연구소)" byAuthor박인성
Showing results 5 to 5 of 5
| Issue Date | Title | Author(s) |
|---|---|---|
| 2019-12 | Plasma Etching of SiO2 with CF3I Gas in Plasma-Enhanced Chemical Vapor Deposition Chamber for In-Situ Cleaning | 박인성 |
Showing results 5 to 5 of 5
| Issue Date | Title | Author(s) |
|---|---|---|
| 2019-12 | Plasma Etching of SiO2 with CF3I Gas in Plasma-Enhanced Chemical Vapor Deposition Chamber for In-Situ Cleaning | 박인성 |
