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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 1-5 of 5 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2011-10
Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process
박진구
2012-07
Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning
박진구
2012-08
Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process
박진구
2013-05
Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance
박진구
2016-05
Effect of pH and chemical mechanical planarization process conditions on the copper-benzotriazole complex formation
박진구
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-Subject
3
BENZOTRIAZOLE
3
FILMS
2
ALLOYS
2
CHEMICAL-MECHANICAL PLANARIZATION
2
CMP
2
COPPER
2
CORROSION
2
ENVIRONMENTS
2
OXIDATION
2
SLURRY
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2011
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