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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 81-84 of 84 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2011-02
Generation of Pad Debris during Oxide CMP Process and Its Role in Scratch Formation
박진구
2011-01
Effect of Rinse Process on Removal of Crown Type Defects during Photoresist Development
박진구
2011-01
Effect of Rinse Process on Removal of Crown Type Defects during Photoresist Development
박진구
2016-05
Effect of pH and chemical mechanical planarization process conditions on the copper-benzotriazole complex formation
박진구
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CMP
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SURFACE
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Pellicle
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REDUCTION
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BENZOTRIAZOLE
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Ceria
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CHEMICAL-MECHANICAL PLANARIZATION
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Corrosion
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FILMS
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Fixed abrasive pad
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