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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 61-70 of 84 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2015-01
Characterization of Cu-BTA Organic Complexes on Cu during Cu CMP and Post Cu Cleaning
박진구
2015-02
Investigation of oxide layer removal mechanism using reactive gases
박진구
2015-03
Multi-Stack Extreme-Ultraviolet Pellicle with Out-of-Band Reduction
박진구
2015-03
Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography
박진구
2015-04
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
박진구
2015-02
Large-Scale Plasma Patterning of Transparent Graphene Electrode on Flexible Substrates
박진구
2015-02
Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation
박진구
2015-06
Comparison between sapphire lapping processes using 2-body and 3-body modes as a function of diamond abrasive size
박진구
2015-08
Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage
박진구
2015-08
Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL)
박진구
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CMP
5
SURFACE
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Pellicle
4
REDUCTION
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BENZOTRIAZOLE
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Ceria
3
CHEMICAL-MECHANICAL PLANARIZATION
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Corrosion
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FILMS
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Fixed abrasive pad
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