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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 11-20 of 84 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2011-11
Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications
박진구
2013-04
Fluorocarbon film-assisted fabrication of a CoNi mold with high aspect ratio for nanoimprint lithography
박진구
2013-04
Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers
박진구
2013-04
On the mechanism of material removal by fixed abrasive lapping of various glass substrates
박진구
2012-07
Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning
박진구
2012-08
Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process
박진구
2012-08
Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask
박진구
2012-08
미세금형 가공을 위한 전기화학식각 공정의 유한요소 해석 및 실험결과 비교
박진구
2016-06
Fabrication of hydrophobic/hydrophilic switchable aluminum surface using poly(N-isopropylacrylamide)
박진구
2012-04
Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window
박진구
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CMP
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SURFACE
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Pellicle
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REDUCTION
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BENZOTRIAZOLE
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Ceria
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CHEMICAL-MECHANICAL PLANARIZATION
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Corrosion
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FILMS
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Fixed abrasive pad
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