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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 1-4 of 4 (Search time: 0.0 seconds).
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Issue Date
Title
Author(s)
2016-09
Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning
박진구
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
박진구
2015-03
Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography
박진구
2015-04
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
박진구
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EUVL
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CD uniformity
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Deflection
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Deformation
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Ellipsometry
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EUV
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EUV lithography
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EUV pellicle
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Extreme UV
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Lithography
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2018
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2015
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