Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion
- Title
- Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion
- Other Titles
- TaOx
- Author
- 홍진표
- Keywords
- PERPENDICULAR magnetic anisotropy; ANNEALING of metals; X-ray photoelectron spectroscopy; DIFFUSION; ATOMS
- Issue Date
- 2014-09
- Publisher
- AIP Publishing LLC.
- Citation
- Journal of Applied Physics, 2014, 116(11), P.113902-1~113902-5
- Abstract
- We report that a TaOx underlayer enhances the stability of perpendicular magnetic anisotropy (PMA) in TaOx/Ta/CoFeB/MgO stacks during annealing; control of oxygen content in the TaOx layer is critical. X-ray photoelectron spectroscopy observations revealed clear suppression of Ta atom diffusion towards the CoFeB/MgO interface or MgO regions. The TaOx underlayer possibly served as a diffusion sponge, permitting some thermally activated Ta atoms to impregnate the TaOx underlayer via a diffusion path, such as grain boundaries. We propose a possible mechanism for enhanced PMA stability based on diffusion of thermally activated Ta atoms.
- URI
- https://aip.scitation.org/doi/abs/10.1063/1.4895709http://hdl.handle.net/20.500.11754/52584
- ISSN
- 0021-8979
- DOI
- 10.1063/1.4895709
- Appears in Collections:
- COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > PHYSICS(물리학과) > Articles
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