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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
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Results 1-10 of 24 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2002-06
The effect of plasma exposure and annealing atomosphere on shallow junction formation using plasma source ion implantation
김곤호
2000-06
Asymmetric plasma potential fluctuation in an indutive plasma source
김곤호
2001-04
Plasma Source Ion Implantation for Ultrashallow Junctions: Low Energy and High Dose Rate
김곤호
2001-04
웨이블렛 변환을 이용한 정전 탐침 자료분석
김곤호
2001-04
Electrostatic probe diagnostic of a planar type radio -frequency inductively coupled oxygen plasma
김곤호
2001-03
정전 탐침을 이용한 유도 결합형 반응기에서 발생하는 산소 플라즈마의 특성연구
김곤호
2001-02
정전탐침을 이용한 ICP Plasma 에서의 E- H mode 변환에 관한 연구
김곤호
2001-02
약한 외부자장에 의한 유도결합형 플라즈마에서의 Helicon wave 발생에 관한 연구
김곤호
2001-02
안테나 형태에 따른 대면적 ICP 플라즈마의 균일도 변화에 관한 연구
김곤호
2001-07
Scaling Characteristics of Plasma Parameters for Low-Pressure Oxygen RF discharge Plasmas
김곤호
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-Subject
2
Plasma source ion implantation
1
0.15µm MOSFET
1
background doping concentration
1
Conductivity
1
Cross-field diffusion coefficient
1
Cross-field heat conductivity
1
Density scrape-off length
1
DISCHARGE PLASMAS
1
Gene Conversion
1
Ion ratio
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-Date issued
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2002
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2001
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1999
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