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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-3 of 3 (Search time: 0.002 seconds).
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2007-09
Which Mask is Preferred for Sub-60 nm Node Imaging?
오혜근
2007-10
Process Extension Techniques for Optical Lithography: Thermal Treatment, Polarization and Double Patterning
오혜근
2007-04
Resist Reflow Modeling Including Surface Tension and Bulk Effect
오혜근
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thermal treatment
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