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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-3 of 3 (Search time: 0.002 seconds).
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2007-10
Process Extension Techniques for Optical Lithography: Thermal Treatment, Polarization and Double Patterning
오혜근
2008-11
A mask generation approach to double patterning technology with inverse lithography
오혜근
2008-11
A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
정영대
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오혜근
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double patterning
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inverse lithography
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OPTICAL LITHOGRAPHY
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polarization
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thermal treatment
-Date issued
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2008
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2007
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