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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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2010-03
Mechanism of Embedded Micro/Nano Channel Formation for a Negative-tone Photoresist by Moving Mask Lithography
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2010-12
Simulation Study of Sub-10 nm Pattern Formation Using Diblock Polymer Directed Self-assembly
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2010-05
A study of virtual lithography process for polymer directed self-assembly
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Lithography
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Self-assembly
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Block copolymer
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Chemically amplified resist
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Embedded fluidic channels
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Inverse lithography
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Negative resist
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