Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 60 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Simulation of mask induced polarization effect on imaging in immersion lithography
오혜근
2006-02
Evaluation of partial coherent imaging using the transfer function in immersion lithography
오혜근
2006-02
Dielectric properties of <001>-oriented Ba0.6Sr0.4TiO3 thin films on polycrystalline metal tapes using biaxially oriented MgO/γ-Al2O3 buffer layers
강보수
2006-02
Studies on the La substitution site in Bi4-xLaxTi3O12 by polarization-dependent x-ray absorption spectroscopy
강보수
2006-02
Numerical modeling of absorber characteristics for EUVL
오혜근
2006-02
Reflow modeling for elongated contact hole shape
홍주유
2006-02
The effect of transmission reduction by reticle haze formation
오혜근
2006-01
Optical lithography simulator for the whole resist process
오혜근
previous
1
2
3
4
...
next
next
Discover
-Author
21
정영대
18
오혜근
8
권영헌
5
정희준
4
강보수
2
김옥경
2
홍주유
-Subject
2
alternating phase shift mask
2
bias
2
chromeless phase lithography (CPL)
2
Chromeless Phase Shift Mask
2
Contact hole
2
Lithography
2
lithography
2
Navier-stokes equation
2
Optical Proximity Correction (OPC)
2
optical proximity correction (OPC)
next >
BROWSE
Communities & Collections
Titles
Authors