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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-9 of 9 (Search time: 0.004 seconds).
Item hits:
Issue Date
Title
Author(s)
2018-10
Pattern Degradation with Larger Particles on EUV Pellicle
오혜근
2005-04
Reduction of the Absorber Shadow Effect by Changing the Absorber Side Wall Angle in Extreme Ultraviolet Lithography
오혜근
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2005-03
Line width variation with absorber thickness in extreme ultraviolet lithography
오혜근
2017-03
CD Error Caused by Aberration and Its Possible Compensation by Optical Proximity Correction in Extreme-Ultraviolet Lithography
오혜근
2008-02
22 nm node contact hole formation in extreme ultra-violet lithography
오혜근
2004-11
Aerial image characterization for defects in an extreme-ultraviolet mask
오혜근
2017-01
Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations
오혜근
2016-09
Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning
오혜근
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CD uniformity
3
EUV mask
2
Aerial image
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Multilayer defect
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Pellicle
2
Pellicle deformation
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22 nm node
1
aerial image
1
Aerialimage
1
CD degradation
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-Date issued
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2010 - 2018
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2004 - 2009
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