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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-4 of 4 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2016-03
Stress-induced pellicle analysis for extreme-ultraviolet lithography
오혜근
2016-09
Mechanical stress induced by external forces in the extreme ultraviolet pellicle
오혜근
2018-10
A possible wafer heating during EUV exposure
오혜근
2008-11
Influence of Various Defects on Extreme Ultra-Violet Mask
오혜근
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Pellicle
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Stress
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22 nm node
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Contrast
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Defect
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Deformation
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Lithography
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thermal deformation
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Wafer heating
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2018
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2016
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2008
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