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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 11-20 of 60 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2006-02
Optimization of chromeless phase mask by comparing scattering bars with zebra patterns
오혜근
2006-02
Mask error enhancement factor variation with pattern density for 65 nm and 90 nm line widths
오혜근
2006-02
Improvement of column spacer uniformity in a TFT LCD panel
오혜근
2006-05
Low field magneto-transport properties of (La0.7Sr0.3MnO3)0.5:(ZnO)0.5 nanocomposite films
강보수
2006-11
Transport Properties of Coupled Semiconductor Quantum Dots
정희준
2006-11
Semiconductor Quantum Structures for Infrared Detection Using Nano-Patterned Grating Geometry
정희준
2006-07
Quantum and plasma screening effects on electron–hydrogen polarization transport collisions in partially ionized plasmas
김옥경
2006-11
Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography
정희준
2006-11
Investigation of optimum biasing and undercut for single trench alternating phase shift mask in 193 nm lithography
오혜근
2006-11
Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
정희준
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-Author
21
정영대
18
오혜근
8
권영헌
5
정희준
4
강보수
2
김옥경
2
홍주유
-Subject
2
alternating phase shift mask
2
bias
2
chromeless phase lithography (CPL)
2
Chromeless Phase Shift Mask
2
Contact hole
2
Lithography
2
lithography
2
Navier-stokes equation
2
Optical Proximity Correction (OPC)
2
optical proximity correction (OPC)
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