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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 41-50 of 171 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2005-10
Mask Error Enhancement Factor Variation with Pattern Density
오혜근
2005-10
Reticle Haze Measurement by Spectroscopic Ellipsometry
오혜근
2006-12
Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography
오혜근
2005-10
ArF photoresist parameter optimization for mask error enhancement factor reduction
오혜근
2005-10
Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry
오혜근
2005-05
Reduction in the Mask Error Factor by Optimizing the Diffraction Order of a Scattering Bar in Lithography
오혜근
2005-07
Lens aberration effect on the line width for different pattern shapes and duty ratios
오혜근
2005-07
Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry
오혜근
2005-08
Line-width variation with absorber thickness in extreme ultraviolet lithography
오혜근
2005-07
Numerical investigation of defect printability in extreme ultraviolet (EUV) reflector: Ru/Mo/Si multilayer system
오혜근
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-Subject
20
Lithography
9
EUV lithography
9
lithography
8
ellipsometry
8
EUVL
7
EUV mask
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
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-Date issued
2
2020 - 2021
26
2010 - 2019
141
2000 - 2009
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1999 - 1999
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