Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 51-60 of 141 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2008-11
A mask generation approach to double patterning technology with inverse lithography
오혜근
2008-05
Application of ellipsometry in immersion lithography
오혜근
2008-11
Influence of Various Defects on Extreme Ultra-Violet Mask
오혜근
2008-11
Acid diffusion length dependency for 32 nm node attenuated and chromeless phase shift mask
오혜근
2008-11
Heat conduction to photoresist on top of wafer during post exposure bake process:II. Application
오혜근
2008-11
Solving the Navier-Stokes Equation for Thermal Reflow
오혜근
2008-11
Haze defects due to pellicle adhesive
오혜근
2008-11
Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process
오혜근
2008-11
22 nm 1:1 line and space patterning by using double patterning and resist reflow process
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
오혜근
previous
1
...
3
4
5
6
7
8
9
...
next
next
Discover
-Subject
17
Lithography
9
lithography
8
ellipsometry
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
5
Aerial image
5
EUV lithography
5
EUV mask
next >
-Date issued
2
2009
23
2008
14
2007
18
2006
20
2005
12
2004
20
2003
19
2002
9
2001
4
2000
next >
BROWSE
Communities & Collections
Titles
Authors