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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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2008-02
Critical dimension control for 32 nm node random contact hole array using resist reflow process
오혜근
2008-02
Critical dimension control for 32 nm node random contact hole array using resist reflow process
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optical proximity correction
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viscosity
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2008
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