Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
ETC
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 11 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2008-11
A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
안일신
2008-11
Heat conduction to photoresist on top of wafer during post exposure bake process: I. Numerical Approach
오혜근
2008-11
A mask generation approach to double patterning technology with inverse lithography
오혜근
2008-11
Heat Conduction to Photoresist on Top of Wafer during Post Exposure Bake Process: I. Numerical Approach
김도완
2008-11
Heat Conduction to Photoresist on Top of Wafer during Post Exposure Bake Process: II. Application
김도완
2008-11
Heat conduction to photoresist on top of wafer during post exposure bake process:II. Application
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
정희준
2008-08
Ellipsometry for Pellicle-Covered Surface
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
안일신
2008-11
A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
정영대
previous
1
2
next
Discover
-Author
4
오혜근
2
김도완
2
안일신
1
신동수
1
정영대
1
정희준
-Subject
2
analytical method
2
chemically amplified resist
2
de-protection
2
heat conduction
2
multiscale conductivity and thick...
2
OPTICAL LITHOGRAPHY
2
PEB process
2
post exposure bake
2
Volterra-type integral equations
< previous
BROWSE
Communities & Collections
Titles
Authors