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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 27 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2018-10
A possible wafer heating during EUV exposure
오혜근
2018-10
Pattern Degradation with Larger Particles on EUV Pellicle
오혜근
2017-06
Influence of a non-ideal sidewall angle of extreme ultra-violet mask absorber for 1×-nm patterning in isomorphic and anamorphic lithography
오혜근
2017-09
Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node
오혜근
2017-03
Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography
오혜근
2017-03
CD Error Caused by Aberration and Its Possible Compensation by Optical Proximity Correction in Extreme-Ultraviolet Lithography
오혜근
2017-03
Arc-shaped slit effect of EUV lithography with anamorphic high NA system in terms of critical dimension variation
오혜근
2016-06
Throughput compensation through optical proximity correction for realization of an extreme ultraviolet pellicle
오혜근
2016-04
Eco-friendly photolithography using water-developable pure silk fibroin
오혜근
2018-05
modeling of thermomechanical changes of euv mask and their dependence on absorber variation
오혜근
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-Subject
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EUV lithography
4
Pellicle
3
CD uniformity
3
EUV
3
EUVL
3
extreme ultraviolet lithography
3
extreme ultraviolet pellicle
3
LITHOGRAPHY
3
pellicle
3
Pellicle deformation
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