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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 13 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2006-02
The Effect of Transmission Reduction by Reticle Haze Formation
안일신
2006-02
Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns
안일신
2006-05
Ellipsometry를 이용한 193 nm photoresist에서의 물의 흡수 연구
안일신
2006-09
Morphology and ellipsometry study of pentacene films grown on native SiO2 and glass substrates
안일신
2006-11
Nonlinear Optical Response of 1-D Photonic Crystals Fabricated by Using a SOl-Gel Method
안일신
2006-11
Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography
안일신
2006-11
Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
안일신
2006-07
Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography
안일신
2006-09
Picosecond Nonlinear OPtical Transmission Measurement on Anatase TiO2 THin Films
안일신
2006-08
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
안일신
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ellipsometry
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193 nm excimer laser
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alternating phase shift mask
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Anisotropy
1
anti-reflection coating (ARC)
1
bias
1
chlorine
1
chromeless phase lithography (CPL)
1
Contact hole
1
contamination
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