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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-8 of 8 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-11
Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
안일신
2006-11
Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
정희준
2006-11
Chromeless phase lithography using scattering bars and zebra patterns
오혜근
2008-09
Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask
안일신
2008-09
Optimum Biasing for 45 nm Node Chromeless and Attenuated Phase Shift Mask
오혜근
2008-09
Optimum biasing for 45 nm node chromeless and attenuated phase shift mask
신동수
2006-03
Optimization of chromeless phase mask by comparing scattering bars with zebra patterns
신동수
2006-11
Chromeless phase lithography using scattering bars and zebra patterns
신동수
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-Author
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신동수
2
안일신
2
오혜근
1
정희준
-Subject
5
transmission
5
zebra patterns
4
chromeless phase lithography (CPL)
4
scattering bars (SBs)
3
45nm line and space
3
attenuated phase shift mask (att....
3
bias
3
chromeless phase lithography (CPL...
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chromeless phase shift mask
1
phase
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2008
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2006
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