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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-9 of 9 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2017-06
Influence of a non-ideal sidewall angle of extreme ultra-violet mask absorber for 1×-nm patterning in isomorphic and anamorphic lithography
오혜근
2017-09
Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node
오혜근
2017-03
Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography
오혜근
2017-03
CD Error Caused by Aberration and Its Possible Compensation by Optical Proximity Correction in Extreme-Ultraviolet Lithography
오혜근
2017-03
Arc-shaped slit effect of EUV lithography with anamorphic high NA system in terms of critical dimension variation
오혜근
2017-02
Thermal analysis of extreme ultraviolet pellicle with metallic coatings
오혜근
2017-12
thermo-optical optimization of extreme-ultraviolet pellicles for future generations
오혜근
2017-01
Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations
오혜근
2017-10
Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle
오혜근
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EUV lithography
2
LITHOGRAPHY
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Pellicle deformation
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Absorber
1
CD uniformity
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Coma
1
EUV mask
1
EUV PELLICLE
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EUV pellicle
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EUV pellide
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