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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 12 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2016-06
Throughput compensation through optical proximity correction for realization of an extreme ultraviolet pellicle
오혜근
2016-04
Eco-friendly photolithography using water-developable pure silk fibroin
오혜근
2016-03
Non-isotropic shadow effect with various pattern direction in anamorphic high numerical aperture system
오혜근
2016-03
Throughput compensation through optical proximity correction for realization of an extreme-ultraviolet pellicle
오혜근
2016-03
Stress-induced pellicle analysis for extreme-ultraviolet lithography
오혜근
2016-03
Feasibility of a new absorber material for high NA extreme ultraviolet lithography
오혜근
2016-01
Impact of a deformed extreme ultraviolet pellicle in terms of the critical dimension uniformity
오혜근
2016-08
Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system
오혜근
2016-09
Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning
오혜근
2016-09
Mechanical stress induced by external forces in the extreme ultraviolet pellicle
오혜근
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extreme ultraviolet lithography
3
Pellicle
2
EUV
2
EUVL
2
extreme ultraviolet optical proxi...
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extreme ultraviolet pellicle
2
pellicle
2
Stress
2
throughput
1
anamorphic numerical aperture
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