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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 41-50 of 83 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-06
Mask Haze Measurement by Spectroscopic Ellipsometry
안일신
2006-06
Patterning of Thin Copper Films under UV exposure in Chlorine-Based Liquids
안일신
2004-12
Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films
안일신
2001-08
Alignment and Calibration of the MgF2 Biplate Compensator for Applications in Rotating Compensator Multichannel Ellipsometry
안일신
2003-02
A practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer,
안일신
2003-02
Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer
안일신
2003-02
A Practical Method of Extracting the Photoresist Exposure Parameters by Using a Dose-to-Clear Swing Curve
안일신
2003-02
Lithography Process Optimization Simulator for an Illumination System
안일신
2003-02
Resist Pattern Collapse Modeling for Smaller Features
안일신
2004-05
Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle
안일신
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-Subject
10
ellipsometry
8
Ellipsometry
4
Lithography
3
calibration
3
lithography
3
Navier-Stokes equation
2
32 nm line and space half-pitch
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ALIGNMENT
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bias
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BIPLATE COMPENSATOR
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-Date issued
6
2010 - 2019
77
2000 - 2009
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