Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
ETC
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 31-40 of 89 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-07
Evaluation of partial coherent imaging using the modulation transfer function in immersion lithography
오혜근
2006-08
Modeling for Resist Reflow of an Elongated Contact Hole
오혜근
2006-08
The influence of transmission reduction by mask haze formation in ArF lithography
오혜근
2005-12
Rigorous coupled-wave analysis를 이용한 극자외선 리소그래피에서 그림자 효과를 줄이기 위한 마스크 변형
오혜근
2005-06
Bulk effects of thermal flow resists
오혜근
2005-06
Calibration-Free Multichannel Ellipsometry for Retardance Measurement
오혜근
2005-11
Defect characterization of Ru/Mo/Si EUV reflector by optical modeling
오혜근
2005-11
Simulator for resist-reflow process by boundary movement
오혜근
2005-10
Mask Error Enhancement Factor Variation with Pattern Density
오혜근
2005-10
Reticle Haze Measurement by Spectroscopic Ellipsometry
오혜근
previous
1
2
3
4
5
6
7
...
next
next
Discover
-Subject
12
Lithography
8
lithography
6
Lithography simulation
6
Resist reflow process
5
EUV lithography
5
EUV mask
5
EUVL
5
Navier-Stokes equation
4
Chemically amplified resist
4
Contact hole
next >
-Date issued
2
2009
23
2008
14
2007
18
2006
20
2005
12
2004
BROWSE
Communities & Collections
Titles
Authors