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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 18 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Simulation of mask induced polarization effect on imaging in immersion lithography
오혜근
2006-02
Evaluation of partial coherent imaging using the transfer function in immersion lithography
오혜근
2006-02
Numerical modeling of absorber characteristics for EUVL
오혜근
2006-02
The effect of transmission reduction by reticle haze formation
오혜근
2006-01
Optical lithography simulator for the whole resist process
오혜근
2006-02
Optimization of chromeless phase mask by comparing scattering bars with zebra patterns
오혜근
2006-02
Mask error enhancement factor variation with pattern density for 65 nm and 90 nm line widths
오혜근
2006-02
Improvement of column spacer uniformity in a TFT LCD panel
오혜근
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193 nm excimer laser
1
32 nm node
1
Absorber characteristics
1
Aerial image intensity
1
alternating phase shift mask
1
anti-reflection coating (ARC)
1
benchmark simulation
1
bias
1
chromeless phase lithography (CPL)
1
Chromeless Phase Shift Mask
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