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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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2016-09
Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
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2016-10
In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope
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Atomic Force Microscopy
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Atomic Resolution Profiler
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FinFET
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Oxide Recess
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