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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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Results 1-10 of 25 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2016-09
Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
김태곤
2016-10
In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope
김태곤
2017-12
Scalable, sub 2μm pitch, Cu/SiCN to Cu/SiCN hybrid wafer-to-wafer bonding technology
김태곤
2019-09
Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process
김태곤
2019-12
Nanocatalyst-induced hydroxyl radical (·OH) slurry for tungsten CMP for next-generation semiconductor processing
김태곤
2019-01
Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications
김태곤
2019-08
Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning
김태곤
2019-10
Investigation of particle agglomeration with in-situ generation of oxygen bubble during the tungsten chemical mechanical polishing (CMP) process
김태곤
2020-02
Hybrid DHF and N-2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
김태곤
2020-06
The adsorption and removal of corrosion inhibitors during metal CMP
김태곤
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Post CMP cleaning
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Brush scrubbing
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Abrasive particles agglomeration
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Acoustic bubble cavitation
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ADS surfactant
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antimony selenide overlayers
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APM
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