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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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Results 1-4 of 4 (Search time: 0.0 seconds).
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Issue Date
Title
Author(s)
2021-03
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
김태곤
2021-04
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
김태곤
2022-05
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
김태곤
2022-11-15
Effect of slurry particles on PVA brush contamination during post-CMP cleaning
김태곤
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김태곤
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Post CMP cleaning
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Brush loading
1
Brush skin layer
1
Ce-O-Si bonding
1
Ce-O-Si bonding, Colloidal Ceria
1
Ceria abrasive
1
Ceria abrasive contamination
1
Cleaning efficiency
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Contamination
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Cross-contamination
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-Date issued
2
2022
2
2021
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