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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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2022-05
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
김태곤
2022-11-15
Effect of slurry particles on PVA brush contamination during post-CMP cleaning
김태곤
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Brush loading
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Brush skin layer
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Ceria abrasive
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Ceria abrasive contamination
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Cleaning efficiency
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Contamination
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Cross-contamination
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Post CMP cleaning
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Post-CMP cleaning
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Silica abrasive
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