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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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Results 1-6 of 6 (Search time: 0.0 seconds).
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Issue Date
Title
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2021-03
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
김태곤
2021-04
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
김태곤
2021-02
Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
김태곤
2021-02
The Effect of Thermal Aging on Nano-Particle Removal
김태곤
2021-02
Effect of Dissolved Oxygen on Removal of Benzotriazole from Co During a Post-Co CMP Cleaning
김태곤
2021-02
Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process
김태곤
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Brush scrubbing
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Post CMP cleaning
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Ce-O-Si bonding
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Ce-O-Si bonding, Colloidal Ceria
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Oxide CMP
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STI CMP
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