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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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2022-01
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
김태곤
2022-05
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
김태곤
2022-02
Study on PVA Brush Loading and Conditioning during Shallow Trench Isolation Post-CMP Cleaning Process
김태곤
2022-11-15
Effect of slurry particles on PVA brush contamination during post-CMP cleaning
김태곤
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Brush scrubbing
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Acoustic bubble cavitation
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Brush loading
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Brush skin layer
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Ceria abrasive
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Ceria abrasive contamination
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Cleaning efficiency
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Contamination
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Cross-contamination
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Dissolved gas
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