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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
ELECTRICAL ENGINEERING(전자공학부)
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1998-05
Barrier metal properties of amorphous tantalum nitride thin films between platinum and silicon deposited using remote plasma metal organic chemical vapor method
오재응
1998-12
Remote plasma-assisted metal organic chemical vapor deposition of tantalum nitride thin films with different radicals
오재응
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plasma process
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tantalum nitride
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thermal stability
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amorphous thin film
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diffusion barrier
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pentakis-dimethyl-amino-tantalum ...
-Date issued
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1998
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