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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
ELECTRICAL ENGINEERING(전자공학부)
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2001-01
이중 타겟의 동시-스퍼터링을 이용한 CuNi 박막 제작시 증착변수가 박막의 물성에 미치는 영향
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co-sputtering
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CuNi alloy
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electrical resistivity
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structural properties
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