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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
ELECTRICAL ENGINEERING(전자공학부)
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2004-01
Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs
박진석
2004-01
Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs
박진석
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-Subject
2
Electrode metal
2
Film bulk acoustic resonator
2
Mo
2
Piezoelectric AlN film
2
Resonator frequency response
2
Resonator return loss
2
Texture coefficient
-Date issued
2
2004
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