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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-8 of 8 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2009-11
A novel approach for scratch detection and study on dependency of scratches during oxide CMP
박진구
2009-02
Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave
박진구
2009-02
Effect of O-2 Pretreatment on Fluorinated Carbon Film Surfaces
박진구
2009-02
Effects of size, humidity, and aging on particle removal from Si wafers
박진구
2009-01
Effect of pH in Ru Slurry with Sodium Periodate on Ru CMP
박진구
2009-04
Development of inlaid electrodes for whole column electrochemical detection in HPLC
박진구
2009-10
Effect of Polysilicon Wettability on Polishing and Organic Defects during CMP
박진구
2009-10
Convective Assembly and Dry Transfer of Nanoparticles Using Hydrophobic/Hydrophilic Monolayer Templates
박진구
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Laser shock wave cleaning
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PRE
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Adhesion force
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Aging
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Alumina thin film
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atomic force microscope (AFM)
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Defect detection
1
EUVL
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Extreme ultraviolet lithography
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fluorinated carbon (FC) film
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