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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 81-82 of 82 (Search time: 0.002 seconds).
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2008-04
Effect of sodium periodate in alumina-based slurry on Ru CMP for metal-insulator-metal capacitor
박진구
2008-01
Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing
박진구
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CMP
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Cu CMP
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AFM/LFM
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Anti-stiction layer
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BTA
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