Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 31-40 of 82 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2005-03
핫 엠보싱용 점착방지막으로 사용되는 10 nm급 두께의 Teflon-like 박막의 형성 및 특성평가
박진구
2005-11
실험 계획법을 이용한 점착방지막용 플라즈마 증착 공정변수의 최적화 연구
박진구
2006-02
IPA 저온 접합법을 이용한 PMMA micro CE chip의 제작
박진구
2005-09
마이크로 구조물 형성을 위한 핫 엠보싱용 플라스틱 스탬프 제작
박진구
2005-07
부식방지제(BTA)가 첨가된 Cu CMP 슬러리에서의 연마거동과
박진구
2005-09
Ruthenium CMP에서 Cerium Ammonium Nitrate와알루미나 연마 입자가 연마 거동에 미치는 영향
박진구
2006-00
Experimental and analytical study of submicrometer particle removal from deep trenches
박진구
2005-11
Cu Oxide와 Silicon Tip 사이의 나노트라이볼러지 작용
박진구
2005-11
Effect of Corrosion inhibitor, Benzotriazole(BTA), on Particle Adhesion in Cu CMP
박진구
2008-05
Effect of a guard-ring on the leakage current in a Si-PIN X-ray detector for a single photon counting sensor
박진구
previous
1
2
3
4
5
6
7
...
next
next
Discover
-Subject
7
CMP
5
Cu CMP
3
AFM/LFM
3
Anti-stiction layer
3
BTA
3
Chemical mechanical planarization...
3
Etch rate
3
Hot Embossing
3
Nanoimprinting
3
Removal rate
next >
-Date issued
8
2009
11
2008
11
2007
9
2006
19
2005
10
2004
BROWSE
Communities & Collections
Titles
Authors