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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-3 of 3 (Search time: 0.001 seconds).
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2007-01
Silicon nitride cantilever array integraded with silicon heaters and piezoelectric detectors for probe-based data storage
이선영
2007-01
Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage
이선영
2007-03
Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage
이선영
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cantilever
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probe-based data storage
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tip
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electrical coupling
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high speed
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piezoelectric
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piezoresistor
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probe
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probe; piezoelectric
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PZT actuator
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-Date issued
3
2007
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