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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2022-02
A Strategy for Wafer-Scale Crystalline MoS2 Thin Films with Controlled Morphology Using Pulsed Metal-Organic Chemical Vapor Deposition at Low Temperature
안지훈
2023-05-13
Low-Temperature Growth of 2D-MoS2 Thin Films by Plasma-Enhanced Atomic Layer Deposition Using a New Molybdenum Precursor and Applicability to Gas Sensors
안지훈
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(2) thin films
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2D materials
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low temperature film growth
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low-temperature film growth
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molybdenum precursor
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morphology control in MoS
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plasma-enhanced atomic layer depo...
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pulsed metal-organic chemical vap...
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ransition-metal dichalcogenides
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transition metal dichalcogenides
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2023
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2022
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