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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2023-11
Enhanced physical and electrical properties of HfO2 deposited by atomic layer deposition using a novel precursor with improved thermal stability
안지훈
2022-11-28
Phase control of two-dimensional tin sulfide compounds deposited via atomic layer deposition
안지훈
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Annealing conditions
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Hafnium oxide
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Leakage current
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MIM capacitor
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Novel precursor
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Phase transition
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Tin sulfide compounds
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Two-dimensional material
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2023
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2022
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