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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-4 of 4 (Search time: 0.002 seconds).
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Title
Author(s)
2018-10
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
박진구
2010-11
The removal of nanoparticles from sub-micron trenches using megasonics
박진구
2017-12
Adhesion and removal behavior of particulate contaminants from EUV mask materials
박진구
2014-07
Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning
박진구
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EUV mask
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Particle removal
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Acoustic bubble growth rate
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Acoustic cavitation
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Cleaning
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Gas dissolved water
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Hydrocarbon contaminant
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MIR-FTIR
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