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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2019-06
A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process
박진구
2018-10
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
박진구
2013-02
Development of CO2 gas cluster cleaning method and its characterization
박진구
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Conditioning process
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EUV mask
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Gas cluster
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Hydrocarbon contaminant
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Megasonic cleaning
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PBMS (particle beam mass spectrom...
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Post CMP cleaning
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PVA brush
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Ruthenium surface
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2019
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2013
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