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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2015-05
Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation
박진구
2014-02
Abrasive and additive interactions in high selectivity STI CMP slurries
박진구
2012-10
Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing
박진구
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High selectivity
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Shallow trench isolation
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Amino acids
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Chemical Mechanical Planarization
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Poly(acrylic acid-co maleic acid)...
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